PRODUCTS & TECHNOLOGY
APS vacuum dry system is designed by the top experts in various industries, covering from multi size multi chambers to advanced control system. APS vacuum dry system has highest customer satisfaction rate in various surveys.
| Items | Specification | ||
| Chamber materials | stainless steel | ||
| Vacuum speed | atmospheric pressure up to 20 Pa, customized timesetting according to customer requirements | ||
| Pump | International brand (according to customer's requirements) | ||
| Vent | Use N2 or CDA | ||
| Substrate handling | Manual or automatic | ||
| Obervation window | Configuration | ||
| Vacuum process control |
Automatic butterfly valve 3-step opening control + customization Stop when reach the vacuum level or setting time; Pressure and time curves recordable |
||
| Items | Specification | ||
| Vacuum speed | customized according to customer requirements | ||
| Temperature range | Max.120℃ | ||
| Temperature uniformity | ±3℃ | ||
| Heater source arrangement | outside the chamber | ||
| Number of chamber | single or double | ||
|
Substrate support pin |
Removable (Magnetically Fixed) | ||
| Vacuum process control | ≥5-Step vacuuming +Main vacuuming Process + customization | ||
| Vacuum break | N2 Purge (MFC)+ Break Filter | ||
| Vacuum pump | Kashiyama or equivalent | ||
| Trap tank | Trap method with cold water condensation and automatic draining | ||
| Inner cavity cleanliness | better than class 100 | ||
